Fast, automated pick and place system with barcode reading and inventory management will minimize human interaction with reticles.

Fully modular system that can be configured to match your use case.

Single unit stores up to 3000 reticles in a compact footprint.

Multiple units can be linked together to increase capacity.

Available without storage as a stand alone handling system.

Multiple load ports that can accommodate single and multi-reticle SMIF pods.

Also Toppan and Pozzetta shipping boxes.

Optional pod storage and OHT interface capable.

Automatic reticle orientation for Nikon or ASML use case.

Positive pressure purge with ULPA Fan Filter Units or XCDA.

SECS/GEM compliant.

The major systems are off the shelf name brand components. PLC based control system. No operating system is needed for core functionality. No legacy OS to support. No custom devices to fail or go obsolete. Easier to replace and service.